YUAN Zhi-rong1, GUO He-ping2. Local programmable automatic compensation technology of silicon piezoresistive pressure sensor[J]. 2008, 27(11): 72-73+77. DOI: 10.13873/j.1000-97872008.11.028.
硅压阻式压力传感器的现场可编程自动补偿技术
摘要
为了提高硅压阻式压力传感器温度性能指标
并实现快速补偿
通过以ADμC816微处理器为核心设计了智能压力传感器
提出了传感器在宽温区下测量误差的自动补偿办法
通过对IC sensor系列压力传感器的应用
使其温度性能提高了1
2
个数量级。
Abstract
In order to improve the temperature performance of the silicon piezoresistive pressure sensor and achieve rapid compensation
a smart pressure sensor based on ADμC816 microprocessor is designed
and a automatic compensation mean is introduced for the measurement error under wide temperature range.The result presents that the temperature performance of the IC sensor series of pressure sensor is improved 1