Performance of micro inertial device primarily depends on the mechanical characteristic of its spring-loaded structure.Catering for the requirements for high precision micro inertial devices and the permeation of micro fabrication technology

spring-loaded structures of micro inertial devices are becoming increasingly complex

but they are still assembled by simple elements.Based on the aforesaid viewpoint

a novel matrix-based analytic modelling method is presented.The method can be applied to complex spring-loaded structures’ design and analysis.Basic concepts

reference frame transformation and lumping computation of stiffness coefficients matrix or compliance coefficients matrix are discussed

and approach of the method is instanced.