Aimed at quadrature error induced with mechanical coupling

the dynamic equations of MEMS gyroscopes including error are given

under the condition of open loop detection and closed loop detection quadrature error is analyzed separately.Effect of quadrature error on MEMS gyroscope performance is inhibited and the input angular rate signal is extracted by using the method of correlation detection.Simulink is used on the modeling and simulation of gyroscope

the simulation results show that the effect of quadrature error can be eliminated effectively under the condition of open loop detection and closed loop detection.Hence

the validity of the theoretical analysis is verified.