Filters are the basic building blocks in frequency converting systems

such as tuners and receivers.Filters based on MEMS technology not only offer clear performances

such as low insertion loss and power loss

but also are useful for integrating the whole radio frequency front ends and transceivers on a chip.The recent development for MEMS tunable filters is summarized.Compared with the tunable MEMS filters only realized by tunable capacitor

the fractal tunable MEMS filters have lower loss and wider tuning range.