An optical fiber connector based on MEMS technology is presented.Nickel thin film cover plate is manufactured on the SiO2 layer above the silicon V-shaped groove to form two-layers structure.This structure can be both used as a cover plate under normal temperature and a electro-thermal micro actuator in the temperature rising process.Optical fiber can be put into the V-groove when the two-layers structure warps during this process.The relationship between the structure parameters and the thermal actuator’s capability is simulated and analyzed by Ansys

the optimize structure is got.