Parametric changes of eddy current sensors have significant influence on its performances

so the key for design of the sensors is to optimize probe coils.Electromagnetic numerical simulation for eddy current proximity sensors including coil and metallic target is finished with finite element analysis software Ansoft Maxwell.Magnetic lines from excitation coil and eddy current density distribution in target are calculated.Experimental result and simulating result of coil impedance are compared quantitatively

and the accurateness of simulation process is verified

so it will contribute to further perfect theoretical analysis and optimal design for eddy current sensors.