The convertional shape of thin film for capacitive humidity sensor is rectangular body

yet it can effect the response time for its limited upper area and some part covered by upper electrode.Cylindrical and cirque body structure is introduced

admiting vapour enteting from circumambience.The fill favtor k is introduced here to explain the cirque body.Normalize the capacitance and find the response time of cirque body is 10 times faster than rectangular body and the cirque body can deminish 77.2 % for cylindrical body

furthermore

the cylindrical and cirque body havn’t request for thickness of the film

which can minish the bulk.