REN Da-hai, YAN Mei-zhi, YOU Zheng. Principle and research progress of resonant MEMS magnetometer[J]. 2007, (11): 10-12+16. DOI: 10.13873/j.1000-97872007.11.012.
the characteristics and the applications of the resonant magnetometer are introduced.The current research on the resonant magnetometers is summarized from the detailed performances.The characteristics and the advantages of two different types resonant MEMS magnetometers(vertical and horizontal)are compared and analyzed.The drive and the control modes of the resonant magnetometer are explained together with the measurement methods of the sensor’s signal.Finally
the development trend of the resonant magnetometers is analyzed.It is indicated that the trend in the future is the improvement of its resolution through reasonable structure design
novel micromachining technologies and the enhancement of the signal detection precision.