Substrate-integrated electrodes are the key components in implantable microsystems for recording of neural signals or electrical stimulation of nerves.A micro fabrication technique is introduced to fabricate multielectrode arrays based on a new flexible substrate—Parylene.The process technology for Parylene-based microelectrode arrays is described.Surface topography and electrical properties of the microelectrodes are characterized by optical microscope and electrochemical method.The result indicates that in the working frequeney（104

1

05Hz）

the impedance is low（400～1 000 Ω）

and the phase angle is small（-20°）

which is suit for the application of retinal renovation.