The principle and the corresponding structures of the ZnO piezoelectric thin film acoustic sensor are presented.The static

modal and harmonic analyses of the piezoelectric thin film acoustic sensor are carried out by using software ANSYS 9.0.The sensitivity of the piezoelectric thin film acoustic sensor is 16.4 mV/Pa by the static analysis.The first-order inherent frequency of the sensor is 12.379 kHz by modal analysis.The relationship between inducted voltage and dynamic pressure frequency is deduced by harmonic analysis.All these analyses are helpful to design such acoustic sensor in theory.