CAI Yu-li, DING Gui-fu, DAI Xu-han, et al. Development of 1×16 MEMS optical fiber connector array[J]. 2007, (7): 87-88+92. DOI: 10.13873/j.1000-97872007.07.037.
A silicon based optical fiber connector array using MEMS technology is presented.The devices are miniaturized
integrated manufacturable and reproducible.Combining the silicon V-shaped groove and the electroplated streamlined nickel cover plate
bell-mouthed crimping channel for easy insertion and double cantilever beams clamping channel for precise position and self-splicing are formed in each unit.Commercial ansys software is used to model and simulate the suppress force of the beams under different thickness and displacement conditions.The results are compared with the theoretical analysis.Array(1×6) is successfully extended.The volume is only 6.8 mm×15.2 mm×0.5 mm and the insertion loss of each unit is about 0.3 dB.