QIAO Xue-guang, LI Ting, WANG Hong-liang, et al. Study on pressure sensing characteristics of fiber Bragg grating[J]. 2007, (4): 52-53+57. DOI: 10.13873/j.1000-97872007.04.029.
光纤Bragg光栅压力传感特性研究
摘要
提出了以半导体硅材料作为光纤Bragg光栅(FBG)衬底的FBG压力传感密封型结构
并对其压力传感特性进行了研究
结果表明:FBG的中心反射波长漂移对压力呈现良好的线性响应特性
在0
3
5MPa的测压范围内
压力调谐灵敏度为0.034 nm/MPa
有良好的机械性能和稳定性能。通过对实验数据的拟合分析表明:采用这种材料
其中心波长和压力变化有着好的线性拟合度和重复性
且迟滞很小
它们的相关系数都达到0.99
在光传感领域具有实用价值。
Abstract
A new structural of the fiber Bragg grating(FBG) pressure sensor based on the semiconductor quartz underlay material is developed and the pressure characteristic of the sensor is experimented.The results show that the centre wavelength of FBG is linear to the pressure.The measured pressure sensitivity of the FBG sensor is about 0.034 nm/MPa and the measuring range is 0
3
5 MPa;The experiment indicates that the sensor has good linearity and repeatability between the centre wavelength of the FBG and pressure change and there is little hysteresis effect
their pertinence coefficient is more than 0.99.It will have the value in the field of the optics sensor.