A monolithic three-axis acceleration sensor based on single inertial mass is designed.Its sensing part is a thin yielding cylinder on which eight holes are opened at two levels

so the shear stress can be gained in three axes.The static and dynamic characteristics of the sensor are analyzed by finite element method.The calculations and experiments prove this sensor is high sensitivity and small cross sensitivity in three axes.Its cross sensitivity is less than 6.5 %.The non-linear error is less than 2 %.The free frequency is more than 1 700 Hz.