A novel electromagnetic MEMS microactuator with bistable positions is presented.The proposed structure for the microactuator consists of a magnetic torsional beam with two fixed ends

a magnetic cantilever beam with two free ends

permanent magnets

magnetic path and double-layer planar coils.The cantilever beam has two stable positions due to the use of the permanent magnets

and a low-power-consumption microactuator will be obtained.The microactuator will switch from one stable position to the other one with the planar coils.The microactuator is simulated by the finite element method.The working mechanism for the bistability of the microactuator is verified.The result of simulation shows that iron core has a crucial effect on the function of the microacturator.