QI Xiao-jin, LIU Jun, SHI Yun-bo. Design of high gn micro-accelerometer[J]. 2006, (10): 60-63. DOI: 10.13873/j.1000-97872006.10.020.
高gn值微加速度计的设计
摘要
设计了一种新型四梁压阻式MEMS高gn(gn=9.8m/s2)值加速度计
其量程为0
1
50 000gn
抗冲击200 000gn
横向灵敏度小于6%。根据设计指标及强度条件对结构参数进行了优化设计
并进行应力分析、抗冲击分析、横向效应分析以及灵敏度分析。同时
利用有限元分析软件
对模型进行了静态应力分析和模态分析
给出了具体的分析结果
并与理论值加以比较
从而使该高gn值加速度计的结构分析和设计更加合理。
Abstract
A high g
n
piezoresistive accelerometer with 4-beam mass is designed.Measuring range is 0~(150 000 g
n
);the extreme impact is 200 000 g
n
;transverse sensitivity is less than 6 %.According to the target and the condition of strength
the structure parameters are optimally designed
the analyses of the stress
the ability of resisting impact
the transverse sensitivity are processed.The static stress and modal properties are analyzed by FEA.Through the analysis result is compared with the theoretical result
the analysis for the structure and design of the accelerometer are completed more rational.