JI Hai-ping~. Study on electricity rigidity compensation of miniature hemisphere gyroscope’s resonator[J]. 2006, (9): 46-48. DOI: 10.13873/j.1000-97872006.09.015.
微型半球陀螺非轴对称结构的电刚度补偿方法研究
摘要
微型半球谐振陀螺仪可以感测角速度和转角。但由于实际结构的非轴对称性
导致感测上产生误差。提出了一种电刚度补偿方法
即调节67.5
°90
°112.5
°135°不同位置的4个平衡电极的电压来调节谐振体刚度
从而达到结构轴对称;并通过有限元分析方法和灵敏度法求得4个平衡电极的电压值。
Abstract
The miniature hemisphere resonance gyroscope is used to measure not only the rotation rate but also the rotation angle.But as a result of the actual structure’s asymmetry
it causes the feeling error.The electricity rigidity compensation is proposed;the balance electrodes’ voltages at the position of 67.5°
90°
112.5°
135° are regulated to adjust the resonant body rigidity
therefore achieving the structure axial symmetry.And the voltage values of four balanced electrodes are obtained by the finite element analysis method and the sensitivity method.