One of the main research topics of silicon pressure sensor is silicon ultra-low-pressure sensor.Based on the analysis of advantages and disadvantages of piezoresistive

capacitive and resonant pressure sensors and review of their low-pressure-orientation research progresses

capacitive model for the preliminary prototype of silicon ultra-low-pressure sensor（0～100 Pa）is determined.Aiming at the main research difficult point

dual-differential structure

that is both mechanical and electronic structures are differential

is proposed and its research prospect is evaluated.