SONG Ren-wang, CHEN Lin-ying. Application technology of sensor in ultra-low frequency active vibration isolation system[J]. 2006, (8): 71-73. DOI: 10.13873/j.1000-97872006.08.025.
and applications of displacement sensor used in ultra-low frequency active vibration isolation control are introduced.The vibrational fountain analysed that affects electrostatic suspension accelerometer measurable precision and theoretical calculation worked out in measurable frequency range of electrostatic suspension accelerometer.A test about linear variable differential transformer(LVDT) is made.The experiment shows that the sensor has a very ideal measurement result in the range of 10