QIU Zi-xue~1, YUAN Jiang~1, MAO Jian~2. Calibration of position detecting error for improved 2-dimensional position sensitive detector[J]. 2006, (8): 66-68.
QIU Zi-xue~1, YUAN Jiang~1, MAO Jian~2. Calibration of position detecting error for improved 2-dimensional position sensitive detector[J]. 2006, (8): 66-68. DOI: 10.13873/j.1000-97872006.08.023.
改进型二维位置敏感探测器检测误差的校正
摘要
分析了改进表面分流型二维位置敏感探测器(PSD)的工作原理及信号调理电路
针对PSD位置检测误差大的缺点
设计了利用万能工具显微镜进行标定的实验系统
运用误差理论对传感器在A区和B区的X向及Y向位置测试数据进行了校正。实验结果表明:应用这种校正方法
可减少PSD的位置检测误差
其中
A区位置检测误差可减少到±0.02mm。
Abstract
The principle and a signal conditioning circuit of tetra-lateral 2-dimensional position sensitive detector(PSD) are analyzed.The experimental calibration system is built in a multipurpose instrument microscope for reducing the position detecting error of this sensor.Based on the error theory
the measuring datum in direction X and Y of the PSD are calibrated in separately area A and B.Experimental results show that the position detection error of the PSD can be reduced by using this method
and the position detection error in area A is no more than(±0.02 mm).