王善慈. 多晶硅敏感技术(连载二)[J]. 传感器与微系统, 1994,(2):51-59.

Wang Shanci. Sensing Technology Based on Polycryctalline Silicon （Serial two）[J]. 1994, (2): 51-59.

王善慈. 多晶硅敏感技术(连载二)[J]. 传感器与微系统, 1994,(2):51-59. DOI： 10.13873/j.1000-97871994.02.016.

Wang Shanci. Sensing Technology Based on Polycryctalline Silicon （Serial two）[J]. 1994, (2): 51-59. DOI： 10.13873/j.1000-97871994.02.016.