[1]刘晓为,张国威,刘振茂,郭青,高家昌,范茂军,段治安,崔光浩.多晶硅高温压力传感器[J].传感器技术,1990(05):34-35.

Liu Xiaowei Zhang Guowei Liu Zhenmao Guo Qing. The High Temperature Polysilicon Pressure Sensor[J]. 1990, (5): 34-35.

[1]刘晓为,张国威,刘振茂,郭青,高家昌,范茂军,段治安,崔光浩.多晶硅高温压力传感器[J].传感器技术,1990(05):34-35. DOI： 10.13873/j.1000-97871990.05.009.

Liu Xiaowei Zhang Guowei Liu Zhenmao Guo Qing. The High Temperature Polysilicon Pressure Sensor[J]. 1990, (5): 34-35. DOI： 10.13873/j.1000-97871990.05.009.