A micro-electro-mechanical system（MEMS）monocrystalline silicon hotplate is proposed for rapid atomization of high-viscosity liquid.The structure of this chip is designed

whose area is 10 mm×10 mm with 168 500 μm×500 μm atomization holes.The electro-thermal coupling simulation is carried out using ANSYS FEA software

to evaluate the uniformity of temperature distribution.The microporous array and the whole chip are fabricated through anisotropic wet etching process based on 4-inch N-type（100）wafer

whose resistance rate is about 5×10

-3

Ω·cm.The test results show that:the resistance value is about 0.6 Ω at room temperature and positively correlated with temperature

;the temperature distribution of chip is uniform and the difference between the lowest and the highest temperature is about 12.7 %;the temperature can achieve 300 ℃ within 4 with 3.7 V and the glycerin can be quickly atomized.The structure and fabrication process of the chip are very simple and it is easy to be batch manufactured.