GONG Zhongliang, LIU Hanshuang. Research on temperature drift compensation of silicon capacitive high precision biax tilt angle sensor[J]. 2019, (7): 43-45.
GONG Zhongliang, LIU Hanshuang. Research on temperature drift compensation of silicon capacitive high precision biax tilt angle sensor[J]. 2019, (7): 43-45. DOI: 10.13873/j.1000-9787(2019)07-0043-03.
In order to improve the measurement precision of the tilt angle sensor
a temperature drift compensation method based on the least square polynomial piecewise function nonlinear curve fitting is proposed. According to the principle of tilt angle sensor and the characteristic of temperature drift compensation
a two-segment function temperature drift compensation model is established
which ignores the influence of other gross errors
and introduces independent variable temperature and fixed angle. The least square method is used to analyze and process the data collected from the experiment. The experimental results show that the measuring error of the tilt angle sensor reaches 0. 001° in the temperature range of-36 ~ 55 ℃. This method can effectively improve the measuring precision of the inclination sensor and obtain a good compensation effect.