In order to eliminate the influence of temperature on the modal matching of gyroscope

a real-time automatic mode matching control method is described for realizing the micromechanical resonant gyroscope over the temperature range of-30～ 60 ℃. The resonant frequency of the driving mode and the sense mode vary with the temperature linearly. The resonant frequency difference between the two axes also vary with the temperature linearly. The method takes the driving mode resonant frequency as the temperature reference to obtain the twomode resonant frequency difference. In order to match the driving mode resonant frequency

the electrostatic tuning voltage of the sense mode is adjusted based on the resonant frequency difference. The experimental results show that the matching error of sense resonant frequency and driving resonant frequency over the temperature range of-30～ 60 ℃

matching error does not exceed 0. 3 Hz

which demonstrates the feasibility of the method and the matching precision

the open-loop control scheme effectiveness

simultaneously.