WANG Binlong, YANG Bo. Research of uniaxial accelerometer based on tunneling magnetoresistance effect[J]. 2019, (7): 10-13. DOI: 10.13873/j.1000-9787(2019)07-0010-04.
An uniaxial accelerometer based on tunneling magnetoresistance(TMR) effect is presented. The structure principle of tunneling magnetoresistance accelerometer is expounded
and the displacement response formula of accelerometer is derived on the basis of the equivalent model for linear accelerometer. The magnetic field distribution model for cylindrical permanent magnet is established
the relational expression between the magnetic field intensity and the displacement is obtained by means of the translation displacement and magnetic field intensity distribution curve. Combining with the linear characteristics of tunnelirg magneto resistive linear magnetic field sensor
the relational expression between acceleration and the output voltage of the linear magnetic field sensor is obtained. The kinematic characteristics of tunneling magnetoresistance accelerometer are simulated
and the measurement and control circuit of tunneling magnetoresistance accelerometer is designed and verified by experiment. The experimental results show that the scale factor of the tunneling magnetoresistance accelerometer is 307. 03 m V/g and the bias stability of the tunneling magnetoresistance accelerometer is 206. 4 μg
and the nonlinear degree is 1. 65 % when the length
width and height of the elastic beam are 8 mm
1. 8 mm
50 mm
and the vertical distance between the TMR sensor and the bottom of permanent magnet is 5 mm.