A novel micro-electro-mechamical system（ MEMS） current sensor based on three-dimensional（ 3D）induction coil is developed. The sensor is made of glass

which is used as substrate

polyimide is used as support and insulation material. The three-dimensional induction coil is fabricated through sputtering

lithography

electroplating

polishing and other micro-processing technologies. The sensor has the advantages of low power consumption

good linearity

light weight and simple structure. The sensor can be fixed on the surface of the transmission line by U-type clamp

which is easy to install. The experimental results show that the voltage signal output by current sensor is linear with the current in the transmission line

the linearity is 0. 58 %.