A double-beam sandwich capacitor tilt sensor is produced based on excellent elastic beryllium bronze material.On this basis

a dedicated capacitance detection chip MS3110 converts differential capacitance signal of tilt sensor to voltage signal

and adjusts its parameters by the control of the microcontroller STM32 for nonlinearity compensation of sensor

so as to malce inclination measurement instrument system has good linearity.Data is displayed on screen by ADC acquisition and conversion. Experiments show that the capacitive inclination measuring instrument system has the characteristics of wide measuring range

high stability and good linearity.