半导体氢传感器工作温度特性

刘丹峰; 周海燕; 文勇

doi:10.13873/j.1000-9787(2018)11-0060-03

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半导体氢传感器工作温度特性

研究与探讨 | 更新时间：2025-09-11

- 半导体氢传感器工作温度特性
- Working temperature characteristics of semiconductor hydrogen sensor
- 传感器与微系统 2018年37卷第11期页码：60-62
- 作者机构：
  
  中国工程物理研究院总体工程研究所
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-9787(2018)11-0060-03
  中图分类号： TP212
- 纸质出版：2018
- 稿件说明：
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[1]刘丹峰,周海燕,文勇.半导体氢传感器工作温度特性[J].传感器与微系统,2018,37(11):60-62.

LIU Dan-feng, ZHOU Hai-yan, WEN Yong. Working temperature characteristics of semiconductor hydrogen sensor[J]. 2018, 37(11): 60-62.
[1]刘丹峰,周海燕,文勇.半导体氢传感器工作温度特性[J].传感器与微系统,2018,37(11):60-62. DOI： 10.13873/j.1000-9787(2018)11-0060-03.

LIU Dan-feng, ZHOU Hai-yan, WEN Yong. Working temperature characteristics of semiconductor hydrogen sensor[J]. 2018, 37(11): 60-62. DOI： 10.13873/j.1000-9787(2018)11-0060-03.

摘要

半导体氢传感器的气敏材料在工作过程中需要较高的工作温度

工作温度的不同对测量精度和响应时间也有一定的影响。采用以掺杂贵金属的Sn O2为气敏材料的氢传感器

考察其在不同温度下对不同浓度氢气的测量情况

研究氢传感器的工作温度特性。

Abstract

Gas sensitive materials of semiconductor hydrogen sensor needs high temperature during working

and different working temperature has a certain influence on the measurement precision and response time. The experiment uses hydrogen sensor with noble metal-doped Sn O2 as gas sensitive material

measurement of different concentrations of hydrogen at different temperatures is analyzed and study on working temperature characteristics of hydrogen sensor.

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references

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