Lü Yun-fei, PAN Meng-chun, HU Jia-fei, et al. Hysteresis suppression method of integrated MEMS/GMR sensor[J]. 2018, (10): 8-11. DOI: 10.13873/j.1000-9787(2018)10-0008-04.
1/f noise is main factor to restrict detection ability of magneto-resistive( MR) sensors at low frequency.And magnetic line of force modulation based on micro-electro-mechanical systems( MEMS) can reduce 1/f noise above two orders. However
nonlinear response caused by magnetic hysteresis is the main problem to restrict its application
as well as unidirectional response property problem. A bi-direction pulse magnetization method is proposed which can reduce magnetic hysteresis dramatically and improve linearity of integrated MEMS/GMR sensors. in addition
bipolar magnetic field detection can be achieved by distinguishing the response disparity and pulse magnetization of bi-direction. Experimental results show that the bi-direction pulse magnetization method can realize 91 % reduction of hysteresis and 15. 4 % improvement of sensitivity.