The corrugated diaphragm of pressure sensors which has isolated packaging structure

relationship between structural parameters and mechanical properties of the corrugated diaphragm are analyzed with ANSYS finite element software. Finite element numerical solutions and analytical solution are compared

results precsion and finite element model are verified. With ANSYS analysis results

effects of the diaphragm structures with different corrugated shapes on mechanical properties is compared. Aiming at sinusoidal corrugated diaphragm

effect of diaghragm thickness

wave height and ripple number on characteristics are studied in detail which can provide basis for the optimum design of corrugated diaphragm structure.