ZHANG Fei, XUE Chang-guo, TANG Yu, et al. Design of weak wind force detecting system based on microcantilever sensor[J]. 2018, (7): 73-74+77. DOI: 10.13873/j.1000-9787(2018)07-0073-02.
In order to solve the problem that the existing technology is difficult to detect weak wind force
a weak wind force detection system which is based on microcantilever sensor technology is built and weak wind force is detected by this system. A fiber-coupled laser is used as light source in this sensor platform and the free end of the microcantilever is radiated by the laser. The tiny displacement caused by the weak wind force at the free end of the microcantilever is amplified by the principle of the optical lever
and the relative position of the spot on the photosensitive surface of the four-quadrant detector is detection. The Lab VIEW program is used to control the data acquisition and display the microcantilever de
flection displacement curve in real time. The experimental results show that the deflection distance of the microcantilever and the wind force detected by the microcantilever have a good linear relationship. The wind force corresponding to the triple noise of the system is about 1. 5 × 10
-4
N
and the average standard deviation of the wind force detection results is 6. 7 × 10