Aiming at technical problem of large element dispersion and batch production difficulty that globular catalytic gas sensor has

use platinum thin film technology and combine laser micromachining and ion beam dry etching technology

manufacturing process of catalytic sensors micro-structure size and heating sensitive electrode are accomplished. γ-Al

2

O

3

/SnO

2

active carriers are fabricated using chemical co-precipitation method and decorated with ThO

2

+ CeO

2

using doping technology

select Pd and Pt as catalysts. The catalytic methane sensor with microstructure is fabricated. The test results show that the sensor has a fast response to methane gas

with 90 % response time o

f 10 s and recovery time of 12 s

average sensitivity of the sensor output is 17 mV/（ 1 %） CH

4

.