A temperature compensation system based on double exponential function model is presented aiming at limitations that algorithm of current temperature compensation technology is complicated and it is bard to integrated to chip. The coefficients of the model are calculated by alternating iteration method and the exponential function is calculated by the CORDIC algorithm with extended convergence domain and digital fixed-point technique

which is modeled by hardware description language. Simulation and experiment result shows that the drift decreases by an order of magnitude after compensation by the double exponential function model which can also achieve precision of high-order polynomial fitting. As the hardware description language is used to design the digital compensation circuit module

the design is relatively simple and the compensation technology is easier to be integrated into the MEMS accelerometer

it has good application value in engineering.