Design and simulation of Z-axis micromechanical fluidic gyroscope based on open gas flow channel is presented. The gas flow field inside the sensitive device is calculated by utilizing 3D transient finite element analysis based on fluid-solid coupling. The calculation results and test indicate that sensitive fluidic chamber maintains a stable sensitive fluid in a complete cycle of the piezoelectric vibrator

which establishes the sensitive foundation of the fabrication of a micromechanical open Z-axis fluidic gyroscope in using the Coriolis effect

. Gas flow under the drive of piezoelectric pump

entering and conjugating from the two inlet

generates the high velocity sensitive fluid in the nozzle orifice. The stable flow is created in between inlet and outlet. Distance from the hotwires to the nozzle orifice that satisfies the expectation of response frequency at L

z

= 1. 8 mm

and the optimal distance between two parallel lines is satisfied the minimum expectation of non-linearity with Δl = 0. 7 mm. Under the condition of static

velocity gradient between the hotwires r1 and r2 is zero. When angular rate is applied

velocity gradient between the hotwires r1 and r2 is not zero but enlarging with the angular increasing. Z-axis sensitivity of gyroscope is 2. 0 μV（（ °）/s）

a non-linearity is prior to 0. 5 %

power consumption is 5. 4 m W

hotwires resistance is 3 Ω and the temperature coefficient of hotwire resistance（ TCR） is 2 600/℃

in range of± 120°/s. The proposed method of finite element analysis open an effective study path for optimization design of micromechanical open Z-axis fluidic gyroscope development.