Aiming at the problem of dynamic measurement of silicon on insulator（ SOI） piezoresistive noise sensor

acoustics structure is designed by acoustics features analysis foundation

to ensure frequency response character of noise sensor. A kind of SOI acoustics sensitive membrane chip and an acoustics sensitive structure fomed by acoustics cavity and the chip are designed

so that the purpose of adjusting acoustics cavity frequency character can be achieved by adjusting structure parameters. Test result shows that the noise sensor has excellent dynamic detection performance.