In order to further decrease cost of sensing electrodes of electrochemical seismometer

and increase its sensitivity

promoting its development in the field of geophysical exploration

a MEMS-based electrochemical seismic sensor based on flexible microelectrodes is presented.Compared with silicon-based fabrication process

the proposed fabrication process of the microelectrodes can effectively decrease the cost and reduce intervals between the electrodes

leading to a significantly increase in the sensitivity of the device.Fabrication process of the proposed flexible microelectrodes is introduced and the performance of the proposed device is test. Test result demonstrates that the sensitivity is one order higher than that of silicon-based counterpart.