热蒸发石墨烯基SnO<sub>x</sub>-Sn传感器气敏性研究

王玮; 高在青; 蒋烨; 杨宗耀; 谢海芬

doi:10.13873/j.1000-9787(2018)03-0011-03

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热蒸发石墨烯基SnO_x-Sn传感器气敏性研究

研究与探讨 | 更新时间：2025-09-11

- 热蒸发石墨烯基SnO_x-Sn传感器气敏性研究
- Study on gas sensitivity of graphene-based SnO_x-Sn sensors fabricated by thermal evaporation
- 传感器与微系统 2018年37卷第3期页码：11-13
- 作者机构：
  
  华东理工大学理学院物理系
- 作者简介：
- 基金信息：
  
  全国大学生创新实验资助项目（201510251062）
- DOI：10.13873/j.1000-9787(2018)03-0011-03
  中图分类号： TP212
- 纸质出版：2018
- 稿件说明：
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[1]王玮,高在青,蒋烨,杨宗耀,谢海芬.热蒸发石墨烯基SnO_x-Sn传感器气敏性研究[J].传感器与微系统,2018,37(03):11-13.

WANG Wei, GAO Zai-qing, JIANG Ye, et al. Study on gas sensitivity of graphene-based SnO_x-Sn sensors fabricated by thermal evaporation[J]. 2018, 37(3): 11-13.
[1]王玮,高在青,蒋烨,杨宗耀,谢海芬.热蒸发石墨烯基SnO_x-Sn传感器气敏性研究[J].传感器与微系统,2018,37(03):11-13. DOI： 10.13873/j.1000-9787(2018)03-0011-03.

WANG Wei, GAO Zai-qing, JIANG Ye, et al. Study on gas sensitivity of graphene-based SnO_x-Sn sensors fabricated by thermal evaporation[J]. 2018, 37(3): 11-13. DOI： 10.13873/j.1000-9787(2018)03-0011-03.

摘要

通过化学气相沉积法制备石墨烯并采用热蒸发法在石墨烯上沉积锡（Sn）及其氧化物

得到石墨烯基SnO

-Sn气敏传感器

研究其在室温下对低体积分数甲醛和二氧化氮（NO

）气体的气敏性及SnO

-Sn膜厚和基底加热温度对传感器气敏性的影响。通过场发射扫描电镜（FESEM）、原子力显微镜（AFM）等表征手段研究了石墨烯基SnO

-Sn气敏传感器的形态结构。

Abstract

Graphene is fabricated by chemical vapor deposition. Graphene-based SnO

-Sn gas sensor is fabricated by thermal evaporation. The gas sensitivity of sensor to low volume fraction of formaldehyde gas or nitrogen dioxide gas at room temperature and effect of thickness of SnO

-Sn film and heating temperature of substrate on gas sensitivity of sensor are studied. The morphological structure of the graphene-based SnO

-Sn gas sensor is characterized by field emission scanning electron microscopy（ FESEM） and atomic force microscopy（AFM）.

关键词

Keywords

references

Graphene Based Electrochemical Sensor for the Detection of Volatile Organic Compounds [J]. Yixin Zhang,Kim KT Lau. 学周刊 . 2014(36)

Reduced Graphene Oxide Mediated SnO 2 Nanocrystals for Enhanced Gas-sensing Properties [J]. Yanhong Chang,Yunfeng Yao,Bin Wang,Hui Luo,Tianyi Li,Linjie Zhi. Journal of Materials Science & Technology . 2013(02)

Sensing behavior of SnO 2 /reduced graphene oxide nanocomposites toward NO 2 [J] . Giovanni Neri,Salvatore Gianluca Leonardi,Mariangela Latino,Nicola Donato,Seunghwan Baek,Donato E. Conte,Patrícia A. Russo,Nicola Pinna. Sensors & Actuators: B. Chemical . 2012

Hydrogen detection using platinum coated graphene grown on SiC [J] . Byung Hwan Chu,C.F. Lo,Justin Nicolosi,C.Y. Chang,Victor Chen,W. Strupinski,S.J. Pearton,F. Ren. Sensors & Actuators: B. Chemical . 2011 (2)

Carbon dioxide gas sensor using a graphene sheet [J] . Hyeun Joong Yoon,Do Han Jun,Jin Ho Yang,Zhixian Zhou,Sang Sik Yang,Mark Ming-Cheng Cheng. Sensors & Actuators: B. Chemical . 2011 (1)

Epitaxially grown graphene based gas sensors for ultra sensitive NO 2 detection [J] . R. Pearce,T. Iakimov,M. Andersson,L. Hultman,A. Lloyd Spetz,R. Yakimova. Sensors & Actuators: B. Chemical . 2011 (2)

Vertically aligned ZnO nanorods and graphene hybrid architectures for high-sensitive flexible gas sensors [J] . Jaeseok Yi,Jung Min Lee,Won Il Park. Sensors & Actuators: B. Chemical . 2010 (1)

Hydrogen sensor based on a graphene – palladium nanocomposite [J] . Ulrich Lange,Thomas Hirsch,Vladimir M. Mirsky,Otto S. Wolfbeis. Electrochimica Acta . 2010 (10)

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热蒸发石墨烯基SnOx-Sn传感器气敏性研究

Study on gas sensitivity of graphene-based SnOx-Sn sensors fabricated by thermal evaporation

DOI：10.13873/j.1000-9787(2018)03-0011-03

摘要

Abstract

关键词

Keywords

references

热蒸发石墨烯基SnO_x-Sn传感器气敏性研究

Study on gas sensitivity of graphene-based SnO_x-Sn sensors fabricated by thermal evaporation