A low precision

high speed analog digital converter（ ADC） is embedded on the basis of traditionalΣ-Δ architecture

to simplify analog interface circuit design of capacitive MEMS accelerometer system. ADC is used to convert analog voltage signal of analog front end amplifier output to digital signal. Based on capacitive MEMS accelerometer system embedded with anADC

an over sampling average digital algorithm is used to evaluate the signal

which can effectively reduce the system requirement of the noise performance of front end amplifier. This method provides potential to achieve low power consumption and high precision design. Simulation results show that SNR of accelerometer presented is improved about 10 dB than that of system without using over sampling average technique.