QI Na, FU Shi-min, WANG Shi-ning, et al. Research on surge detection technology based on MEMS pressure sensor array[J]. 2017, 36(6): 57-58+62. DOI: 10.13873/j.1000-9787(2017)06-0057-02.
A surge detection technique based on MEMS pressure sensor array is introduced. Through placing MEMS pressure sensor array in pressure area
so as to obtain pressure value of each test point
these pressure values are processed to get the pressure change trend of the corresponding area. The MEMS pressure sensor array detection test system verify that this design scheme can accurately detect surge signal
distinguish direction and amplitude change of surge.
A flexible liquid crystal polymer MEMS pressure sensor array for fish-like underwater sensing [J] . A G P Kottapalli,M Asadnia,J M Miao,G Barbastathis,M S Triantafyllou. Smart Materials and Structures . 2012 (11)