A high frequency response triaxial acceleration sensor based on MEMS technology is designed. Filtering circuit and amplifier circuit are integrated in the sensor to realize integrative design of sensor and convertor. The design of circuit is simple

reliable

low power consumption and high stability. The design of flexible-rigid PCB is introduced into the structure of circuit board

which ensures high precision and low noise characteristics. Structure of whole sensor is small and has good rigidity

frequency response of three-directions reach 5 k Hz. The triaxial acceleration parameter can be measured synchronously using the sensor at one measuring point. By the checkout of property and validation of experimentation

the sensor is proved to have the characteristic of high precision

small thermal sensitivity drift and low transverse effect

and it can be used in the fields such as aerospace.