The design of a monolithic piezo-resonant quartz pressure-temperature sensors using quartz force sensing resonator（ QFSR）-quartz temperature sensing resonator（ QTSR）

a structure for monolithic quartz pressure-temperature sensors（ QPTS）

a stress-free sealing scheme for quartz pressure sensor and a new type of pressure-contractility converter are proposed. The monolithic QPTS is composed of QFSR and QTSR

which uses AT cut quartz crystal and thickness shear mode

the difference is that the angle between the long edge orientation of the QTSR and X axis of quartz crystal is 60°. The stress-free sealing scheme for QFSR and QTSR is a combination of quartz

single crystal silicon

non-crystalline SiC

borosilicate glass and Kovar alloy

and the QFSR and QTSR are modified by chemical etching technology and physical modification technology about quartz and the new technology for semiconductor. A non-crystalline SiC layer is prepared in order to achieve the stress buffer:although the mismatch of coefficient of thermal expansion of silicon and quartz

but the non-crystalline SiC layer between the silicon and quartz layers can well absorb the thermal stress

it will become stress-free structure.