Design a novel micro-force sensor

use principle of resistive strain

the sensor adopts pillar type structure

with small range and high sensitivity

sensitivity of the sensor can reach 0.0575V/N

which is suitable for micro force measurement. The elastic component is carried out on finite element static analysis and modal analysis. The lengthways dependent variable of the sensor is much higher than the common force sensor

and the natural frequency is much higher than common external dynamic force frequency

which rarely occur resonance.Finally

static calibration and error analysis is carried out.