Aiming at problems that existing MEMS bionic vector hydrophone has low sensitivity and inherent mechanical properties have a great influence on chip of vibration picking

hydrophone is optimized from two aspects: a new type of cilia material carbon rod instead of optical fiber and embedded encapsulation structure is proposed. Firstly

analyze influence of cilia and encapsulation of hydrophone on sensitivity and frequency band of hydrophone; then conduct simulation by ANSYS. Finally

hydrophone prototype has been tested. The testing results show that performance of hydrophone is greatly improved compared with that of the previous

with a sensitivity improved about 5dB at range of 25

300Hz and

about 10dB at range of 300

1 000Hz

resonance peak of optimized hydrophone is obviously

operation frequency band is broaden and has good directivity which lay foundation for further development of hydrophone and engineering applications.