According to the theory of mesoscopic calender effect

a novel high-sensitive resonant MEMS gyroscope is designed. The mesoscopic calender effect of mirror heterotrimer periodic photonic crystal is used as the basic principle instead of the varistor of traditional piezoresistive microgyroscope. When the axial stress is loaded on photonic crystal

its transmission rate will change

and the angular velocity can be calculated by detecting the intensity of the transmitted light. The structure of the gyroscope is driven by four pairs of comb-capacitance

the drive module and detection module are independent

the coupling coefficient is pretty small

and the mechanical sensitivity are quite high. By numerical calculation and simulation analysis

the micro-gyro frequency matching rate is 0. 6 % and sensitivity of transmissivity is 73μcd /（ °） / s are obtained which demonstrate the frequency-match is good and the angular measurement with high sensitivity can be realized.