To fulfill flow test and calibration of the developed MEMS gas flow sensor prototypes

a simplified flow test device composed of standard flow generator and a signal read-out and data acquisition circuit is designed and fabricated.The standard flow generator is composed of an injector and a variable weight

with a variable weight

a series of suitable constant gas flow rates can be generated at the injector outlet.Feasibility of the simplified standard flow generator is verified by theoretical analysis and numerical simulation with the Ansys software.The sensor read-out circuit and data acquisition circuit are realized based on microcontroller with multi-channel built-in A/D convertors

which has functions as constant temperature control of sensor heater

digital detection and display of flow signals.Using the simplified flow test device

flow test and calibration on the developed MEMS gas flow sensor prototypes is accomplished.Calibration parameters

absolute error and relative error of flow tests of sensor is obtained.