To measure 3D torque and solve problem of coupling between two dimensional

a resistive strain sensor for small torque measuring is designed.The mechanism which curbs the dimension coupling is analyzed by the scheme of bridges of the sensor resistance strain gauge.Nodes strain is calculated by finite element method to achieve the goal of high sensitivity.Through static calibration experiment of sensor

calibration decoupling matrix is obtained and the problem of torque coupling due to processing error and strain gauge paste error is solved.Experimental results show that the sensor has good static performance

and linearity is controlled within 1 % and hysteresis error is below 0.12 %.