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李智源, 彭安杰, 陈真, 等. 静电MEMS微镜的谐振振幅对品质因子影响的研究[J]. 传感器与微系统, 2025,(8):54-58.
李智源, 彭安杰, 陈真, 等. 静电MEMS微镜的谐振振幅对品质因子影响的研究[J]. 传感器与微系统, 2025,(8):54-58. DOI: 10.13873/J.1000-9787(2025)08-0054-05.
静电MEMS微镜的最大扫描角度受到各种能量耗散的制约,在大气环境中,空气阻尼是MEMS微镜能量耗散的主要途径,因此对MEMS微镜的空气阻尼特性进行研究对于扫描角度的优化以及复杂动力学显得尤为重要。利用位置敏感探测器(PSD)对MEMS微镜在空气中的自由衰减振动曲线进行了测量,从实验上获取了MEMS微镜的品质因子与振幅的关系。同时,利用瞬态的三维Navier-Stokes模型对扭转振动的MEMS微镜与周围空气的相互作用进行了模拟,计算得到了微镜在不同振幅下的品质因子。实验与仿真结果表明:MEMS微镜的品质因子随着振幅的增大而减小,因此MEMS微镜中的空气阻尼系数是随振幅增大而增大的,对MEMS微镜进行理论建模以及动力学分析中应该考虑不同振幅下阻尼系数的变化带来的影响。
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Solgaard, Olav,Godil, Asif A.,Howe, Roger T.,Lee, Luke P.,Peter, Yves-Alain,Zappe, Hans.Optical MEMS: From Micromirrors to Complex Systems[J].Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems,2014.
Aslihan Arslan,Dean Brown,Wyatt O. Davis,Sven Holmstrom,Sertan Kutal Gokce,Hakan Urey.Comb-Actuated Resonant Torsional Microscanner With Mechanical Amplification[J].Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems,2010.
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