河南理工大学鹤壁工程技术学院
纸质出版:2025
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胡瑞明. 基于旋涂工艺的单层微结构电容式压力传感器[J]. 传感器与微系统, 2025,(3):98-101+106.
胡瑞明. 基于旋涂工艺的单层微结构电容式压力传感器[J]. 传感器与微系统, 2025,(3):98-101+106. DOI: 10.13873/J.1000-9787(2025)03-0098-04.
针对柔性电容式压力传感器进行了深入分析,结合传统制备方法的不足,设计了一种新型制备工艺,基于该方法制备得到了无微结构、单层以及双层微结构的三种传感器,并通过实验方法对三者的性能进行了对比分析,主要包括响应特性、迟滞特性以及灵敏度等。根据得到的结果可知,相对于其他两种类型的传感器,单层微结构传感器在性能上具有一定的优势,具备了较高的灵敏度,对于载荷分别为0~4 kPa
4~6 kPa和6~25 kPa的情况,对应的灵敏度分别为0.451 kPa
-1
0.14 kPa
-1
和0.03 kPa
-1
。同时在可重复性以及响应速度等方面也具有一定的优势,具备了较强的性能,可用于对人体姿态变化进行有效地监测,适合于应用到可穿戴设备设计中。
孙士斌,钱磊,王培力,秦治伟,牛世聪,朱志浩.基于磁控溅射技术的微结构柔性压力传感器[J].传感器与微系统,2024(09).
唱睿喆,陈怡.基于液态金属磁流变弹性体的柔性触觉传感器[J].传感器与微系统,2024(09).
王臻,王伟,王言徐,刘俊琴.硅压阻式压力传感器耐冲击设计改进[J].自动化与仪表,2024(08).
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刘波,谢锐.电容式扭矩传感器的微小电容检测系统设计[J].传感器与微系统,2022(01).
赵凌云,黄汉雄,罗杜宇,苏逢春.复合材料柔软性对倒金字塔微结构阵列传感器性能的影响[J].高等学校化学学报,2021(09).
刘双斌,秦会斌.柔性阵列式压力传感器的制备研究[J].传感器与微系统,2021(09).
郭小辉,黄英,刘彩霞,刘平,马渊明.微圆顶阵列结构柔性触觉传感器设计与应用研究[J].电子科技大学学报,2018(01).
Jiangtao Yang,Situo Liu,Mingkai Wang,Lei Liang.Solar position detection method by bionic polarized light compass.[J].Optics express,2024.
Yang Jiangtao,Xu Xinyun,Chen Xin,Wang Yin,Liu Ruizhen.Polarized light compass-aided inertial navigation under discontinuous observations environment.[J].Optics express,2022.
Leung Chung Ming,Chen Xiaoqiu,Wang Tao,Tang Yanxue,Duan Zhihua,Zhao Xiangyong,Zhou Helezi,Wang Feifei.Enhanced Electromechanical Response in PVDF-BNBT Composite Nanofibers for Flexible Sensor Applications[J].Materials,2022.
Department of Materials Science and Engineering, Southern University of Science and Technology, Shenzhen, 518055, China.,School of Materials Science and Engineering, Harbin Institute of Technology, Harbin, 150001, China.,Department of Materials Science and Engineering, Southern University of Science and Technology, Shenzhen, 518055, China.,Department of Materials Science and Engineering, Southern University of Science and Technology, Shenzhen, 518055, China.,School of Materials Science and Engineering, Harbin Institute of Technology, Harbin, 150001, China.,Department of Materials Science and Engineering, Southern University of Science and Technology, Shenzhen, 518055, China.,Department of Materials Science and Engineering, Southern University of Science and Technology, Shenzhen, 518055, China.,Department of Materials Science and Engineering, Southern University of Science and Technology, Shenzhen, 518055, China.,School of Materials Science and Engineering, Harbin Institute of Technology, Harbin, 150001, China.,Department of Materials Science and Engineering, Southern University of Science and Technology, Shenzhen, 518055, China.,Department of Materials Science and Engineering, Southern University of Science and Technology, Shenzhen, 518055, China.,Academy for Advanced Interdisciplinary Studies, Southern University of Science and Technology, Shenzhen, 518055, China.,Department of Materials Science and Engineering, Southern University of Science and Technology, Shenzhen, 518055, China.,Academy for Advanced Interdisciplinary Studies, Southern University of Science and Technology, Shenzhen, 518055, China.,Department of Materials Science and Engineering, Southern University of Science and Technology, Shenzhen, 518055, China.,State Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan, 430074, China.,Department of Materials Science and Engineering, Southern University of Science and Technology, Shenzhen, 518055, China..Natural Plant Materials as Dielectric Layer for Highly Sensitive Flexible Electronic Skin.[J].Small (Weinheim an der Bergstrasse, Germany),2018.
Cho Sung Hwan,Lee Seung Won,Yu Seunggun,Kim Hyeohn,Chang Sooho,Kang Donyoung,Hwang Ihn,Kang Han Sol,Jeong Beomjin,Kim Eui Hyuk,Cho Suk Man,Kim Kang Lib,Lee Hyungsuk,Shim Wooyoung,Park Cheolmin.Micropatterned Pyramidal Ionic Gels for Sensing Broad-Range Pressures with High Sensitivity.[J].ACS applied materials & interfaces,2017.
Jianli Cui,Junping Duan,Binzhen Zhang,Xueli Nan.Flexible pressure sensor with a "V-type" array microelectrode on a grating PDMS substrate[J].Sensor Review,2016.
Zhao Hang,Bai Jinbo.Highly sensitive piezo-resistive graphite nanoplatelet-carbon nanotube hybrids/polydimethylsilicone composites with improved conductive network construction.[J].ACS applied materials & interfaces,2015.
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