北京化工大学信息科学与技术学院
纸质出版:2025
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陈辉, 袁泉, 张雨欣, 等. 可切换/可调谐MEMS谐振器综述[J]. 传感器与微系统, 2025,(1):6-10+16.
陈辉, 袁泉, 张雨欣, 等. 可切换/可调谐MEMS谐振器综述[J]. 传感器与微系统, 2025,(1):6-10+16. DOI: 10.13873/J.1000-9787(2025)01-0006-05.
多频段、多模式通信系统需要高精度、多频率可调、稳定可靠的时钟器件作为系统的频率参考源,这类器件直接影响了无线通信的整体性能。MEMS谐振器作为时钟器件应用于通信技术,具有高可靠性、高稳定性、低功耗等优点,特别是可调谐MEMS谐振器在具备单频谐振器的特点之外,还具有多频率、多模态可切换的特点。此外,谐振器还能够用于制作多波段滤波器、传感器、开关等器件,在射频(RF)通信、无线传感等领域中起到重要作用。综述了MEMS谐振器调谐工作的主要原理,介绍了4种主要的调谐机理以及对应的研究成果,根据其工作方式的不同,对4种调谐机理的优缺点进行分析,最后阐述了目前可调谐MEMS谐振器的主要应用领域。
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