中国电子科技集团公司第四十九研究所
纸质出版:2024
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刘宝伟, 王振廷, 宁金明, 等. 基于单晶硅的压阻效应压力传感器低气压输出异常分析[J]. 传感器与微系统, 2024,(10):15-18.
刘宝伟, 王振廷, 宁金明, 等. 基于单晶硅的压阻效应压力传感器低气压输出异常分析[J]. 传感器与微系统, 2024,(10):15-18. DOI: 10.13873/J.1000-9787(2024)10-0015-04.
某型号压阻式压力传感器在实际工程中出现低气压段输出偏高现象,结合该传感器的结构组成,建立导致该现象的故障树,依据故障树逐一进行排除,采用外观检查、绝缘电阻测试、替换可能的故障部件等方式,确定故障出现在压力芯体中;进一步对芯体进行分析,通过显微镜、手捻法等方式方法,确定硅油中存在气泡导致传感器低气压段输出偏高,并对气泡中压力与输入压力之间的3类关系进行分析,得到输入压力小于气泡内部压力时,低气压段输出偏高故障现象的失效机理,并通过在空气环境下封装压力芯体,复现了故障现象,并建议增加对压力芯体进行低温低气压筛选试验。
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National Innovation Center for Digital Fishery, China Agricultural University, China,College of Information and electrical Engineering, China Agricultural University, Beijing, 10083, China,Beijing Engineering and Technology Research Centre for Internet of Thongs in Agriculture China Agriculture University, Beijing 100083, China,Key Laboratory of Agricultural Information Acquisition Technology, Ministry of Agriculture, China Agriculture University, Beijing, 100083, China,National Innovation Center for Digital Fishery, China Agricultural University, China,College of Mechanical and Electronic Engineering, Shandong Agricultural University, Taian, 271000, China,Beijing Engineering and Technology Research Centre for Internet of Thongs in Agriculture China Agriculture University, Beijing 100083, China,Key Laboratory of Agricultural Information Acquisition Technology, Ministry of Agriculture, China Agriculture University, Beijing, 100083, China,College of Mechanical and Electronic Engineering, Shandong Agricultural University, Taian, 271000, China,National Innovation Center for Digital Fishery, China Agricultural University, China,College of Information and electrical Engineering, China Agricultural University, Beijing, 10083, China,Beijing Engineering and Technology Research Centre for Internet of Thongs in Agriculture China Agriculture University, Beijing 100083, China,Key Laboratory of Agricultural Information Acquisition Technology, Ministry of Agriculture, China Agriculture University, Beijing, 100083, China,Business school, University of Bedfordshire, Luton, LU1 3BE, UK.Recent advances in sensor fault diagnosis: A review[J].Sensors and Actuators: A. Physical,2020.
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赵佳龙,岳宏,夏航,丁钟凯,唐胜武.基于LabVIEW的多通道压力传感器实时动态检测系统设计[J].传感器与微系统,2022(07).
胡小峰,陈治龙,张玉芬.导航产品厚膜片式电阻器的防硫化应用[J].电子工艺技术,2020(05).
崔宏敏,陈宝成,崔光浩,丁钟凯,胡运聪.振动环境下压力传感器失效机理分析[J].振动与冲击,2017(02).
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